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Fe base

Product name： FeHf Targets

　　Purity 99.8%
　　Specification
　　●Anelva
　　●Intervac
　　●To customer’s specification
　　

Typical Properties
　　Surface Finish               <= 0.8um
　　Surface Flatness              <=0.1mm
　　Tolerance                    ±0.20mm
　　

Manufacturing Process
　　●Processed by vacuum induction melting, rolling and machining. Clean with ultrasonic cleaning equipment and vacuum sealed.
　　Storage & Handling
　　●Should be stored in dry environment, in its original vacuum packaging, at room temperature.

Typical Analysis

Elements	Max ppm , wt	Elements	Max ppm , wt	Elements	Max ppm , wt
Fe	Matrix	Ca	< 0.05	Pb	0.02
Hf	30.3	Ti	400	Mg	0.35
Sn	2.2	V	1.2	Al	200
Sb	2.5	Cr	230	Si	100
Mn	300	P	50	Co	15
Cu	50	Nb	< 0.5	Ni	500
Zr	0.3 wt%	Mo	43	Ta	< 5
O	≤10	N	< 1	C	≤40

　　Note: 1. Metallic elements were analyzed using GDMS
　　2. Gas elements were analyzed using LECO
　　3. Major elements were analyzed using ICP

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Fe base

Product name： FeHf Targets

Purity 99.8% Specification ●Anelva ●Intervac ●To customer’s specification

Typical Properties Surface Finish <= 0.8um Surface Flatness <=0.1mm Tolerance ±0.20mm

Typical Analysis

Elements

Max ppm , wt

Elements

Max ppm , wt

Elements

Max ppm , wt

Fe

Matrix

Ca

< 0.05

Pb

0.02

Hf

30.3

Ti

400

Mg

0.35

Sn

2.2

V

1.2

Al

200

Sb

2.5

Cr

230

Si

100

Mn

300

P

50

Co

15

Cu

50

Nb

< 0.5

Ni

500

Zr

0.3 wt%

Mo

43

Ta

< 5

O

≤10

N

< 1

C

≤40

Note: 1. Metallic elements were analyzed using GDMS 2. Gas elements were analyzed using LECO 3. Major elements were analyzed using ICP

　　Purity 99.8%
　　Specification
　　●Anelva
　　●Intervac
　　●To customer’s specification
　　

Typical Properties
　　Surface Finish <= 0.8um
　　Surface Flatness <=0.1mm
　　Tolerance ±0.20mm
　　

　　Note: 1. Metallic elements were analyzed using GDMS
　　2. Gas elements were analyzed using LECO
　　3. Major elements were analyzed using ICP